Designing and Modeling MEMS Filter for Mobiles Transceivers

Document Type : Original Article

Authors

senior member IEEE., Silicon Valley for Nanotechnolgy Riyadh ,Saudi Arabia.

Abstract

Abstract
In this paper a 71-MHz band-pass IF MEMS filter
with bandwidth of 140 KHz is designed, modeled and
simulated, the supposed MEMS filter is comprised of two
symmetrical Clamped-Clamped μresonators ,coupled by
soft mechanical beam (spring),the centre frequency of
this filter is the same of the resonance frequency of the
constituent μresonator . The bandwidth is determined by
the physical dimensions of the coupling beam and its
location between the two μresonator beams. The center
frequency of the supposed filter is 71 MHz where the Qfactor
is 511 and insertion loss of 7.8 dB, this device can
be direct placed in the front-end wireless transceiver
circuit.