Performance enhancement of Yagi-Uda antenna using bulk micromachining technique

Document Type : Original Article

Authors

Egyptian Armed Forces.

Abstract

Abstract:
In this paper, silicon micromachining has been applied to enhance the antenna
performance. The work is devoted to diminish the effect of propagation of higher order
modes in substrates with high permittivity in printed antennas; hence one can increase
the antenna bandwidth. The process of micromachining can remove the substrate of the
silicon material of a substrate under some selected elements to enhance the antenna
performance. after etching, the new given structure is effectively enhance the
performance for Yagi Uda printed array operating at f=10 GHz.

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